Iyo 909 Project Very Large Scale Integrated Circuit Factory ibasa guru rekuvaka reindasitiri yezvemagetsi munyika yangu panguva yeChirongwa cheMakore mashanu cheKugadzira machipisi ane upamhi hwemutsara we0.18 microns uye dhayamita mazana maviri.
Iyo tekinoroji yekugadzira yeakakura kwazvo-akabatanidzwa maseketi haingosanganisire yakakwirira-chaiyo tekinoroji senge micro-machining, asi zvakare inoisa zvakakwirira zvinodiwa pakuchena gasi.
Iyo yakawanda gasi inopa yeProjekti 909 inopihwa nemubatanidzwa pakati pePraxair Utility Gas Co., Ltd. yekuUnited States nemapato akakodzera muShanghai kuti vagadzire pamwe chete gwenya rekugadzira gasi. Chigadzirwa chekugadzira gasi chiri padhuze nefekitori yeprojekiti ye909. chivakwa, chinofukidza nzvimbo inosvika 15,000 square metres. Izvo zvakachena uye zvinobuda zvinodiwa zvemagasi akasiyana-siyana
High-purity nitrogen (PN2), nitrogen (N2), uye high-purity oxygen (PO2) inobudiswa nekuparadzaniswa kwemhepo. High-purity hydrogen (PH2) inogadzirwa ne electrolysis. Argon (Ar) uye helium (Iye) inotengwa kunze. Iyo quasi-gasi inonatswa uye inonatswa kuti ishandiswe muProjekti 909. Gasi rakakosha rinopihwa mumabhodhoro, uye gasi bhodhoro kabhineti iri mumusangano wekubatsira weiyo yakabatanidzwa yedunhu rekugadzira chirimwa.
Mamwe magasi anosanganisirawo yakachena yakaoma yakaoma compressed air CDA system, ine vhoriyamu yekushandisa ye4185m3 / h, dzvinyiriro yedova ye -70 ° C, uye chidimbu saizi isingapfuuri 0.01um mugasi panzvimbo yekushandiswa. Kufema compressed air (BA) system, vhoriyamu yekushandisa 90m3 / h, kudzvanywa kwedova point 2 ℃, saizi yechikamu mugasi padanho rekushandisa haina kupfuura 0.3um, process vacuum (PV) system, vhoriyamu yekushandisa 582m3 / h, vacuum degree panzvimbo yekushandisa -79993Pa . Kuchenesa vacuum (HV) system, kushandiswa kwevhoriyamu 1440m3 / h, vacuum dhigirii panzvimbo yekushandisa -59995 Pa. Imba yemhepo compressor room uye vacuum pump room zvose zviri munzvimbo ye909 yeprojekti yefekitari.
Kusarudzwa kwezvinhu zvepombi uye zvishandiso
Iyo gasi rinoshandiswa mukugadzira VLSI rine yakanyanya kuchena zvinodiwa.High-kuchena gasi mapaipianowanzo shandiswa munzvimbo dzakachena dzekugadzira, uye kutonga kwavo kwehutsanana kunofanirwa kuenderana kana kukwirira kupfuura kuchena kwenzvimbo iri kushandiswa! Uye zvakare, yakakwira-kuchena gasi mapaipi anowanzoshandiswa munzvimbo dzakachena dzekugadzira. Pure hydrogen (PH2), high-purity oxygen (PO2) uye mamwe magasi akakosha anogona kubatika, anoputika, anotsigira kupisa kana magasi ane muchetura. Kana iyo gasi pombi system isina kugadzirwa kana zvinhu zvakasarudzwa zvisina kunaka, kwete chete kuchena kwegasi rinoshandiswa panzvimbo yegesi kuderera, asi kuchakundikana zvakare. Iyo inosangana nezvinodiwa maitiro, asi haina kuchengetedzeka kushandisa uye inokonzeresa kusvibiswa kune yakachena fekitori, inokanganisa kuchengetedzwa uye kuchena kwefekitori yakachena.
Kuvimbiswa kwehutano hwepamusoro-kuchena gasi panzvimbo yekushandiswa kwete kungoenderana nekururama kwekugadzirwa kwegasi, midziyo yekuchenesa uye mafiritsi, asi inobatwawo pamwero mukuru nezvinhu zvakawanda muhurongwa hwepombi. Kana isu tichivimba nemidziyo yekugadzira gasi, midziyo yekuchenesa uye mafirita Hazvina kunaka kumisa zvisingaite zvemhando yepamusoro zvinodiwa kutsiva isina kufanira gasi pombi system dhizaini kana kusarudzwa kwezvinhu.
Munguva yekugadzira purojekiti ye909, isu takatevera iyo "Code Yekugadzira Yezvidyarwa Zvakachena" GBJ73-84 (iyo yazvino chiyero ndeye (GB50073-2001)), "Code Yekugadzira YeCompressed Air Stations" GBJ29-90, "Code YeKugadzira KweOkisijeni Zviteshi” GB50030-91 , "Kodhi Yekugadzira Hydrogen uye Okisijeni Zviteshi" GB50177-93, uye akakodzera matekinoroji matanho ekusarudzwa kwepombi zvinhu uye zvishongedzo. "Code for Design of Clean Plants" inotaura kusarudzwa kwezvinhu zvepombi nemavharuvhu sezvinotevera:
(1) Kana gasi kuchena kwakakura kupfuura kana kuenzana ne99.999% uye dova rakadzika pane -76°C, 00Cr17Ni12Mo2Ti yakaderera-carbon stainless simbi pombi (316L) ine electropolished mukati memadziro kana OCr18Ni9 Stainless simbi pombi (304) ine electropolished yemukati madziro inofanira kushandiswa. Ivhavha inofanira kunge iri diaphragm valve kana bellows valve.
(2) Kana gasi kuchena kwakakura kudarika kana kuenzana ne99.99% uye dova rakaderera pane -60 ° C, OCr18Ni9 Stainless steel tube (304) ine electropolished yemukati rusvingo inofanira kushandiswa. Kunze kwemavharuvhu anofanirwa kushandiswa pakupisa gasi mapaipi, mavharuvhu ebhora anofanirwa kushandiswa kune mamwe mapaipi egasi.
(3) Kana dova remhepo yakaoma yakamanikidzwa yakadzikira pane -70°C, OCr18Ni9 pombi yesimbi isina tsvina (304) ine mudhuri wemukati wakakwenenzverwa inofanira kushandiswa. Kana dova rakaderera pane -40 ℃, OCr18Ni9 Stainless simbi pombi (304) kana inopisa-dip galvanized seamless simbi pombi inofanira kushandiswa. Ivhavha inofanira kunge iri vheji yebhero kana vheji yebhora.
(4) Chigadzirwa chevhavha chinofanira kuenderana nekubatanidza pombi zvinhu.
Zvinoenderana nezvinodiwa zvekutemerwa uye akakodzera tekinoroji matanho, isu tinonyanya kufunga zvinotevera zvinhu pakusarudza pombi zvinhu:
(1) Kupinda kwemhepo kwezvinhu zvepombi kunofanirwa kuve kudiki. Mapaipi emhando dzakasiyana ane mhepo inopindirana. Kana mapaipi ane mhepo yakakura yemhepo akasarudzwa, kusvibiswa hakugone kubviswa. Mapaipi esimbi asina tsvina uye pombi dzemhangura zviri nani kudzivirira kupinda nekuora kweokisijeni mumhepo. Zvisinei, sezvo pombi dzesimbi dzisina simbi dzisinganyanyi kushanda kupfuura pombi dzendarira, mapaipi emhangura anoshanda zvikuru mukubvumira mwando mumhepo kupinda mukati mawo. Naizvozvo, pakusarudza mapaipi epaipi-yakachena gasi mapaipi, mapaipi esimbi isina tsvina anofanira kunge ari sarudzo yekutanga.
(2) Nzvimbo yemukati yepombi zvinhu inoshambadzirwa uye ine diki mhedzisiro pakuongorora gasi. Mushure mokunge pombi yesimbi isina tsvina yakagadziriswa, imwe chiyero chegesi ichachengetwa mumatare ayo esimbi. Kana gasi repamusoro-soro richipfuura, chikamu ichi chegasi chichapinda mumhepo inoyerera uye kukonzera kusvibiswa. Panguva imwecheteyo, nekuda kwekudsorption uye kuongorora, simbi iri mukati mepombi yepombi ichabudisawo humwe hupfu hwehupfu, zvichiita kuti kusvibiswa kwepamusoro-kuchena gasi. Kune masisitimu epombi ane kuchena pamusoro pe99.999% kana ppb level, 00Cr17Ni12Mo2Ti yakaderera kabhoni Stainless simbi pombi (316L) inofanira kushandiswa.
(3) Kupfeka kusamira kwepombi dzesimbi isina tsvina kuri nani pane kwepombi dzemhangura, uye guruva resimbi rinogadzirwa nekukukurwa kwemhepo inoyerera ishoma. Masangano ekugadzira ane zvinodiwa zvepamusoro zvehutsanana anogona kushandisa 00Cr17Ni12Mo2Ti yakaderera kabhoni Stainless simbi mapaipi (316L) kana OCr18Ni9 Stainless simbi pombi (304), mapaipi emhangura haizoshandiswe.
(4) Zvepombi masisitimu ane gasi kuchena pamusoro pe99.999% kana ppb kana ppt mazinga, kana mumakamuri akachena ane hutsanana hwemhepo mazinga eN1-N6 anotsanangurwa mu "Clean Factory Design Code", mapaipi ekupedzisira-akachena kanaEP ultra-clean pombiinofanira kushandiswa. Chenesa "chubhu yakachena ine ultra-smooth inner surface".
(5) Mamwe emapombi egasi akakosha anoshandiswa mukugadzira magasi anoparadza zvakanyanya. Mapombi ari mumapaipi aya anofanirwa kushandisa pombi dzesimbi isingadziviriri sepombi. Zvikasadaro, mapaipi achakuvadzwa nekuda kwekuora. Kana makwapa ekuora akaitika pamusoro, mapaipi esimbi asina musono kana galvanized welded simbi mapaipi haafanirwe kushandiswa.
(6) Mumutemo, ese egasi pombi yekubatanidza anofanirwa kusungirirwa. Sezvo kuputika kwepombi dzesimbi kunoparadza galvanized layer, mapaipi esimbi haashandiswe papombi mumakamuri akachena.
Tichifunga nezvezvinhu zviri pamusoro apa, mapaipi epombi egasi nemavharuvhu akasarudzwa mu &7& purojekiti ndeaya anotevera:
Iyo yakakwira-kuchena nitrogen (PN2) system mapaipi anogadzirwa ne00Cr17Ni12Mo2Ti yakaderera-kabhoni Stainless simbi pombi (316L) ine electropolished mukati madziro, uye mavharuvhu akagadzirwa Stainless simbi mabhero mavharuvhu echinhu chimwe chete.
Iyo nitrogen (N2) system pombi inogadzirwa ne00Cr17Ni12Mo2Ti yakaderera-kabhoni-stainless simbi pombi (316L) ine electropolished mukati memadziro, uye mavharuvhu akagadzirwa nesimbi isina tsvina mavharuvhu echinhu chimwe chete.
Iyo yakakwira-kuchena hydrogen (PH2) system mapaipi anogadzirwa ne00Cr17Ni12Mo2Ti yakaderera-kabhoni Stainless simbi mapaipi (316L) ane electropolished mukati memadziro, uye mavharuvhu akagadzirwa nesimbi isina tsvina mavharuvhu echinhu chimwe chete.
Iyo yakakwira-kuchena okisijeni (PO2) system mapaipi anogadzirwa ne00Cr17Ni12Mo2Ti yakaderera-kabhoni Stainless simbi mapaipi (316L) ane electro-yakakwenenzverwa madziro emukati, uye mavharuvhu akagadzirwa nesimbi isina tsvina mavharuvhu echinhu chimwe chete.
Argon (Ar) system pombi dzakagadzirwa ne00Cr17Ni12Mo2Ti yakaderera-kabhoni isina simbi pombi (316L) ine electropolished mukati memadziro, uye Stainless simbi mabhero mavharuvhu echinhu chimwe chete anoshandiswa.
Iyo helium (He) system mapaipi akagadzirwa ne00Cr17Ni12Mo2Ti yakaderera-kabhoni-stainless simbi pombi (316L) ine electropolished mukati memadziro, uye mavharuvhu akagadzirwa nesimbi isina tsvina mavharuvhu echinhu chimwe chete.
Iyo yakachena yakaoma yakaoma compressed air (CDA) system mapaipi anogadzirwa neOCr18Ni9 Stainless simbi pombi (304) ane akakwenenzverwa mukati madziro, uye mavharuvhu akagadzirwa nesimbi isina tsvina mavharuvhu echinhu chimwe chete.
Iyo yekufema yakamanikidzwa mhepo (BA) system mapaipi anogadzirwa neOCr18Ni9 Stainless simbi pombi (304) ine akakwenenzverwa madziro emukati, uye mavharuvhu akagadzirwa nesimbi isina tsvina yebhora mavharuvhu echinhu chimwe chete.
Iyo process vacuum (PV) system mapaipi anogadzirwa neUPVC pombi, uye mavharuvhu anogadzirwa nevhavhavhavhavhavhavhavha akagadzirwa nechinhu chimwe chete.
Iyo yekuchenesa vacuum (HV) system mapaipi anogadzirwa neUPVC pombi, uye mavharuvhu anogadzirwa nevhavhavhavhavhavhavhavha akagadzirwa nechinhu chimwe chete.
Mapombi eiyo yakakosha gasi system ese akagadzirwa ne00Cr17Ni12Mo2Ti yakaderera-kabhoni-stainless simbi pombi (316L) ine electropolished mukati memadziro, uye mavharuvhu akagadzirwa nesimbi isina simbi mavharuvhu echinhu chimwe chete.
3 Kuvaka uye kuisa mapaipi
3.1 Chikamu 8.3 che "Clean Fekitori Yekuvaka Dhizaini Code" inotaura zvinotevera zvinongedzo zvekubatanidza pombi:
(1) Mapombi anosungirirwa anofanirwa kuiswa welding, asi mapombi esimbi anopisa anodhibha anofanirwa kuiswa shinda. Iyo yekuisa chisimbiso yeshinda dzakarukwa dzinoenderana nezvinodiwa zveChikamu 8.3.3 chechirevo ichi.
(2) Pombi dzesimbi dzisina tsvina dzinofanira kubatanidzwa ne argon arc welding uye butt welding kana socket welding, asi mapaipi egasi ane hutsanana anofanirwa kubatanidzwa nekunama butt pasina mavanga pamadziro emukati.
(3) Kubatana pakati pemapaipi nemidziyo kunofanirwa kuenderana nezvinodiwa zvekubatanidza zvemidziyo. Paunenge uchishandisa hose yekubatanidza, hose dzesimbi dzinofanira kushandiswa.
(4) Kubatana pakati pemapaipi nemavharuvhu kunofanirwa kuenderana nemirairo inotevera
① Iyo yekuisa chisimbiso inobatanidza yakakwira-kuchena gasi mapaipi uye mavharuvhu anofanirwa kushandisa simbi gaskets kana maviri ferrules zvinoenderana nezvinodiwa zvekugadzira maitiro uye gasi maitiro.
②Iyo yekuisa chisimbiso pane yakarukwa kana flange yekubatanidza inofanirwa kuve polytetrafluoroethylene.
3.2 Zvinoenderana nezvinodiwa zvezvakatemerwa uye zvinoenderana nehunyanzvi matanho, kubatanidzwa kwepamusoro-kuchena gasi mapaipi kunofanirwa kusungirirwa zvakanyanya sezvinobvira. Direct butt welding inofanira kudziviswa panguva yekuputika. Pombi maoko kana majoini akapedzwa anofanira kushandiswa. Mapombi epombi anofanirwa kugadzirwa nezvinhu zvakafanana uye kutsetseka kwemukati semapombi. chiyero, panguva yekushongedza, kuitira kudzivirira oxidation yechikamu chewelding, gasi rakachena rekudzivirira rinofanira kuunzwa mupombi yekushongedza. Kune mapaipi esimbi isina tsvina, argon arc welding inofanira kushandiswa, uye argon gasi yehutsanana hwakafanana inofanira kuiswa mupombi. Kubatana kwe thread kana kusungirirwa kunofanira kushandiswa. Kana uchibatanidza maflange, ferrules inofanirwa kushandiswa kune tambo dzakabatanidzwa. Kunze kwepombi dzeokisijeni uye mapaipi ehydrogen, iyo inofanirwa kushandisa simbi gaskets, mamwe mapaipi anofanira kushandisa polytetrafluoroethylene gaskets. Kushandisa chidimbu chiduku chesilicone rubber kune gaskets chichashanda zvakare. Enhad sealing effect. Matanho akafanana anofanirwa kutorwa kana flange yekubatanidza yaitwa.
Basa rekuisa risati ratanga, kuongororwa kwakadzama kwepombi,fittings, mavharuvhu, nezvimwewo zvinofanira kuitwa. Rusvingo rwemukati rwepombi dzakajairwa simbi isina tsvina inofanira kubikwa isati yaiswa. Mapaipi, mafittings, mavharuvhu, nezvimwewo zveokisijeni mapaipi anofanirwa kurambidzwa zvachose kubva pamafuta, uye anofanirwa kucheneswa degreased zvinoenderana nezvinodiwa zvinodiwa usati waiswa.
Iyo system isati yaiswa uye kuiswa mukushandiswa, iyo yekufambisa uye yekugovera pombi system inofanirwa kucheneswa zvachose neyakaunzwa yakakwirira-kuchena gasi. Izvi hazvingoputi zvimedu zveguruva zvakangoerekana zvawira muhurongwa panguva yekuisa, asi zvakare zvinotora basa rekuomesa mupombi system, kubvisa chikamu chegasi rine hunyoro rinotorwa nemadziro epombi uye kunyange iyo pombi zvinhu.
4. Pipeline pressure test uye kugamuchirwa
(1) Mushure mekuisirwa sisitimu, 100% ongororo yeradiographic yemapombi anotakura zvinwiwa zvine muchetura mumapombi egasi chaiwo achaitwa, uye hunhu hwawo hauzove hwakaderera pane Level II. Mamwe mapaipi achave ari pasi pe sampling radiographic kuongororwa, uye sampling yekuongorora reshiyo haizove iri pasi pe5%, mhando yacho haizove yakaderera pane giredhi III.
(2) Mushure mekupfuura kuongororwa kusingaparadzi, bvunzo yekumanikidza inofanira kuitwa. Kuti uve nechokwadi chekuoma uye kuchena kwepombi system, hydraulic pressure test haifaniri kuitwa, asi pneumatic pressure test inofanira kushandiswa. Kuedzwa kwemhepo kunofanirwa kuitwa uchishandisa nitrogen kana mweya wakatsikirirwa unoenderana nehutsanana hwekamuri yakachena. Muedzo wekumanikidza wepombi unofanirwa kunge uri 1.15 nguva yekumanikidza kwedhizaini, uye kudzvanywa kwepombi yevacuum kunofanirwa kuve 0.2MPa. Munguva yekuedzwa, kudzvinyirira kunofanira kuwedzera zvishoma nezvishoma uye zvishoma nezvishoma. Kana dzvinyiriro ikakwira kusvika pa50% yekudzvanywa kwebvunzo, kana pasina kukanganiswa kana kuvuza kunowanikwa, ramba uchiwedzera kudzvanya nhanho nedanho negumi muzana yekudzvanywa kwebvunzo, uye kudzikamisa kudzvanywa kwemaminetsi matatu padanho rega rega kusvika pakumanikidzwa kwebvunzo. . Gadzirisa kudzvanywa kwemaminetsi gumi, wozodzikisa kudzvanywa kune dhizaini yekugadzira. Iyo nguva yekumisa kumanikidza inofanirwa kutariswa zvinoenderana nezvinodiwa zvekuonekwa kwekudonha. Iyo inoputira furo inokwanisa kana pasina kuvuza.
(3) Mushure mekunge vacuum system yapfuura bvunzo yekumanikidza, inofanirwawo kuita 24-awa vacuum dhigirii bvunzo zvinoenderana nemagwaro ekugadzira, uye chiyero chekumanikidza hachifanire kunge chakakura kupfuura 5%.
(4) Leakage test. Kune ppb uye ppt giredhi giredhi pombi masisitimu, zvinoenderana neakakodzera maratidziro, hapana kuvuza kunofanirwa kutariswa sekwakakodzera, asi iyo yekuvuza huwandu hweyedzo inoshandiswa panguva yekugadzira, ndiko kuti, kuyerwa kwehuwandu hwekuvuza kunoitwa mushure mekuomerwa kwemhepo. Dzvinyiriro isimba rekushanda, uye kumanikidza kunomiswa kwemaawa makumi maviri nemana. Avhareji yeawa yekudonha ishoma pane kana kuenzana ne50ppm seunokwanisa. Iko kuverengerwa kweiyo leakage kunotevera:
A=(1-P2T1/P1T2)*100/T
Mune formula:
Kubuda kweawa (%)
P1-Absolute kudzvanywa pakutanga kwebvunzo (Pa)
P2-Absolute kudzvanywa pakupera kwebvunzo (Pa)
T1-absolute tembiricha pakutanga kwebvunzo (K)
T2-absolute tembiricha pakupera kwebvunzo (K)
Nguva yekutumira: Zvita-12-2023