1. Bulk Gas System Tsanangudzo:
Kuchengetedza uye kudzvanywa kwekudzora gasi inert Gasi mhando: Yakajairika inert magasi (nitrogen, argon, compressed air, etc.)
Saizi yepombi: Kubva pa1/4 (pombi yekutarisa) kusvika ku12-inch main pipeline
Zvigadzirwa zvikuru zvehurongwa ndeizvi: diaphragm valve / bellows valve / bhora vharafu, high-purity connector (VCR, welding fomu), ferrule connector, pressure regulating valve, pressure geji, nezvimwewo.
Parizvino, iyo nyowani system inosanganisirawo yakawanda yakakosha gasi system, iyo inoshandisa yakagadziriswa gasi silinda kana matangi marori ekuchengetedza uye ekufambisa.
2. Kuchenesa System Tsanangudzo:
Kubviswa kwetsvina kubva kumagasi akawanda kune yakakwirira-kuchena gasi mapaipi
3. Gasi Makabati Tsanangudzo:
Ipa kudzvanya kudzora uye kuyerera kwekutarisa kune yakakosha gasi masosi (ane chepfu, anopisa, anoshanda, anoparadza magasi), uye ave nekugona kutsiva gasi masilinda.
Nzvimbo: Inowanikwa paSub-fab pasi kana pasi pasi pekuchengetera magasi akakosha Source: NF3, SF6, WF6, nezvimwe.
Saizi yepombi: Pombi yemukati yegasi, kazhinji 1/4 inch yepombi yekugadzira, 1/4-3/8 inch kunyanya yekuchena kwakakwira nitrogen purge pombi.
Zvigadzirwa zvikuru: High kuchena diaphragm mavharuvhu, cheki mavharuvhu, mageji ekumanikidza, magaji ekumanikidza, high purity connectors (VCR, welding fomu) Aya makabati egasi ane otomatiki ekuchinja mavharuvhu kuitira kuti gasi rirambe richiwanikwa uye kutsiva kwakachengeteka kwemasilinda.
4. Kugovera Tsanangudzo:
Kubatanidza iyo gasi sosi kune gasi rekuunganidza coil
Saizi yemutsetse: Mufekitori yechip, saizi yepombi yekuparadzira gasi yakawanda kazhinji inotangira pa1/2 inch kusvika 2 inches.
Yekubatanidza fomu: Mapaipi egasi akakosha anowanzo kubatanidzwa newelding, pasina chero mechaniki yekubatanidza kana zvimwe zvinofamba zvikamu, kunyanya nekuti iyo welding yekubatanidza ine yakasimba yekuisa chisimbiso.
Mufekitori yechip chip, kune mazana emakiromita echubhu akabatana kufambisa gasi, ayo anonyanya kuita mamita makumi maviri kureba uye akasungwa pamwechete. Mamwe machubhu anobhenda uye tubular welding yekubatanidza zvakare yakajairika.
5. Multi-function valve box (Valve Manifold Box, VMB) Tsanangudzo:
Iko kugovera magasi akakosha kubva kune gasi sosi kune akasiyana emidziyo migumo.
Mukati pombi saizi: 1/4 inch process pombi, uye 1/4 - 3/8 inch purge pombi. Iyo sisitimu inogona kushandisa komputa kutonga kuti inoda actuated mavharuvhu kana yakaderera mutengo mamiriro nemavharuvhu.
Zvigadzirwa zveSistimu: mavharuvhu akanyanya kuchena diaphragm / mabhero mavharuvhu, cheki mavharuvhu, majoini akanyanya kuchena (VCR, micro-welding fomu), mavharuvhu anodzora mavharuvhu, geji dzekumanikidza uye geji dzekumanikidza, nezvimwewo. Kugovera mamwe magasi anert - VMP (multi-function valve disc) inonyanya kushandiswa, iyo ine yakavhurika gasi disc pamusoro uye haidi yakavharwa nzvimbo dhizaini uye yakawedzera nitrogen purge.
6. Sekondari valve ndiro/bhokisi (Tool Hookup Panel) Tsanangudzo:
Batanidza gasi rinodiwa neiyo semiconductor midziyo kubva kune gasi sosi kusvika kumagumo emidziyo uye ipa inoenderana yekumanikidza mutemo. Iyi pani igasi rekudzora system iri padyo nemagumo emidziyo kupfuura VMB (multi-function valve box).
Gasi pombi saizi: 1/4 - 3/8 inch
Liquid pombi saizi: 1/2 - 1 inch
Kuburitsa pombi saizi: 1/2 - 1 inch
Zvigadzirwa zvikuru: diaphragm vharafu / mabhero vharafu, imwe-nzira vharafu, kumanikidza kunodzora vharafu, gauge yekumanikidza, geji yekumanikidza, yakakwirira-kuchena mubatanidzwa (VCR, micro-welding), ferrule joint, bhora vharafu, hose, nezvimwe.
Nguva yekutumira: Nov-22-2024