Kupisa Kwemvura & Kubvisa Dumbu: Kukanganisa Kuchena Kwegasi Pamusana Pemvura

Mumagasi emazuva ano ane kuchena kwakanyanya, musiyano uripo pakati penzira inobatsira uye kukundikana kunodhura unowanzobva pane zvausingaone. Hunyoro nezvidimbu - zvinoyerwa muzvikamu pabhiriyoni kana kunyange zvikamu patiriyoni - zvinogona kusvibisa chinyararire gasi, kuderedza kunaka kwechigadzirwa, uye kudzima mitsetse yekugadzira semiconductor. Kunyange zvazvo michina yekusefa, yekuchenesa, uye yekudzora kuyerera kwezvinhu ichinyanya kutariswa, chimwe chezvinhu zvinonyanya kukosha pakuchena kwegasi ipombi inotakura gasi. Kupedzwa kwenzvimbo iyoyo kunosarudza kuti inogona kunyudza hunyoro hwakawanda sei, kuti inogona kubata zvidimbu zvingani, uye kuti ichabuda hunyoro hwakawanda sei mukati mehupenyu hwese hwesystem. Gwaro iri rinotsanangura nzira dzekubuda kwehunyoro nezvidimbu, rinoyera kukanganiswa kwekupedzwa kwenzvimbo pakuchena kwegasi, uye rinotsanangura nzira dzekugadzirisa nekushandisa dzinoshandiswa kupa kushanda kwehutsvene hwakanyanya (UHP).

Chii chinonzi "Kudzinga" uye Nei Zvichikosha?

Kubuda negasi (outgassing) kuburitswa zvishoma nezvishoma kwemagasi nehunyoro zvinenge zvanyungudika kana kunyungudika pamusoro pechinhu kana kunyungudika mukati mezvikamu zviri pedyo nepamusoro. Kuburitswa uku kunokonzerwa kana kumanikidzwa kwakapoteredza kwaderera, tembiricha yakwira, kana gasi rekuchenesa rapararira pamusoro - mamiriro chaiwo anowanikwa mumasisitimu ekupa gasi, makamuri evacuum, uye zvishandiso zvekuongorora. Mumasisitimu esimbi isina ngura, utsi hwemvura ndiyo inonyanya kusvibisa gasi, ichiteverwa nemahydrocarbon uye masara emaitiro akasara.

Kunyangwe pahuwandu hunoita sehusina kunyanya kukosha, hunyoro hunogona kusangana nemagasi akakosha, nucleate particles, kufungidzira nhema, uye zvinhu zvinonzwa chepfu zvakaita sema mass flow controllers, mavharuvhu, uye deposition chambers. Sezvo ma geometri emidziyo achiderera uye achigadzirisa mahwindo, indasitiri ye semiconductor yakasundira zvinodiwa zvekuchena kwegasi kubva pazvikamu pamiriyoni (ppm) kusvika pazvikamu pabhiriyoni (ppb) uye zvikamu patriliyoni (ppt). Pamazinga aya, kupenya kwepombi hakusi chinhu chidiki - ipfungwa huru inofanirwa kugadzirwa, kusimbiswa, uye kuchengetedzwa kubva pamill kuenda kumudziyo.

Maitiro Ekutanga

Nzvimbo Yepamusoro Yakawedzera

Nzvimbo isina kusimba ine nzvimbo yakakura zvikuru kupfuura yakapfava, uye nzvimbo yakawanda inoreva nzvimbo dzakawanda dzinogona kunamirwa hunyoro. Hukama uhwu hausi hwakatwasuka: kusimba muchimiro chemakomo, mipata, uye matanho emuganhu wegorosi kunowedzera nzvimbo inoshanda yekumusoro inowanikwa yekunyungudika. Kuderedza kusimba kwepamusoro - kuyerwa seRa, avhareji yekutsauka kwechimiro chepamusoro - kubva pa0.8 µm kusvika ku0.25 µm kunogona kubvisa chikamu chikuru chenzvimbo dzekunyungudika, nekuti mipata yakadzika, inochengeta mvura zvakanyanya, inobviswa zvachose. Ndokusaka kusimba kwepamusoro kuchiwanzotsanangurwa senzvimbo yakavanzika yehunyoro iyo inosarudza kuti sisitimu inofanira kucheneswa kwenguva yakareba sei isati yasvika pakuchena kwekutanga.

Kunyungudutsa kwehunyoro uye kuburitsa mweya

Hunyoro hunoumba zvisungo zvakasimba nesimbi, kunyanya ne oxide layers dzinokura pachisikigo pasimbi isingatsvi. Pamusoro pemvura isina simba, ine chromium yakawanda, mamorekuru emvura anotanga akananga ku oxide, obva aungana se physisorbed layers dzinotevedzana. Kana chubhu ikazosangana ne vacuum kana gasi rinoyerera, layers idzi dzinobuda zvishoma nezvishoma: layers dzekunze dzakasungwa zvishoma nezvishoma dzinotanga kusunungurwa, nepo mvura ine chemisorbed inoramba iripo uye inoda simba, kazhinji muchimiro chekupisa, kuti iburitswe. Mugumisiro unoshanda ndewekuti chubhu ichangobva kuiswa kana isina kugadzirwa zvakanaka ichaburitsa hunyoro mugasi kwemaawa kana mazuva, zvichiwedzera nguva yekuchenesa uye kuchengetedza kuchena kuri pasi pezvinodiwa.

Kubatwa kwezvikamu

Makomba, makomba, uye nzvimbo dziri pamusoro pezvinhu zvisina kusimba zvinoshanda senzvimbo dzinochengetera zvinhu zvisina kusimba. Munguva yekushanda kwakajairika, zvinhu izvi zvinogona kuramba zvakavharirwa, asi kupisa, kudedera, kana kuchinja kamwe kamwe munzira yekuyerera uye kumhanya zvinogona kuzvibvisa, zvichikonzera kusvibiswa mumhepo. Mukugadzira zvinhu zvakasiyana-siyana, chinhu chimwe chete chinogona kukonzera dambudziko guru pawafer, uye zvinhu zvinogara mumakumbo akafa kana mavharuvhu zvinonetsa kubvisa kana sisitimu yave kushanda. Nzvimbo dzakapfava, dzisina makomba hadzingoderedzi huwandu hwezvinhu zvinogadzirwa chete, asi dzinoitawo kuti nzvimbo dziripo dzive nyore kuchenesa nekuongorora.

Mhedzisiro Pakuchena Kwegasi

Kusarudzwa kwekugadzirwa kwechinhu pamusoro pemvura kunobatsira pakuchena kwegasi, nguva yekuchenesa, uye kugara kwenguva refu. Nzvimbo dzakaoma dziri muRa 0.5–0.8 µm — dzinowanikwa muchubhu inotonhorera isina kunatswa — dzinochengeta hunyoro hwakawanda uye zvidimbu. Dzinobuda negasi zvakanyanya, dzinoda nguva yakareba yekuchenesa, uye dzinowanzo shandiswa chete pakushandisa ppm-level uko kusvibiswa kunogamuchirwa. Nzvimbo dzakapfava dziri muRa ≤ 0.25 µm, dzinowanzo gadzirwa neelectropolishing (EP), dzinoita zvakasiyana zvikuru: hadzina nzvimbo dzakawanda dze adsorption, dzinobvisa gasi zvakanyanya, uye dzinogadzira zvidimbu zvishoma. Mhedzisiro yacho yakayerwa muzvidzidzo zvakaburitswa; imwe ongororo pa titanium yakaratidza kuti kudzikiswa kwe35% mukusagadzikana kwemvura pamusoro pemvura kwakaderedza 30% mugasi, uye maitiro akafanana akanyorwa nezvesimbi isingatsvedzeri. Kune masisitimu ekuchena kwe ppb- neppt-level ultra-high, nzvimbo dzakapiswa nemagetsi hadzisi dzepamusoro — inodiwa.

Kupera Kwepamusoro Kunokanganisa Sei Kushanda Kwesystem

Kupera kwemvura pamusoro pevhu kunokanganisa zvakawanda kupfuura kudonha kwemhepo. Kunokanganisa nguva yekuchenesa (nzvimbo dzakapfava dzinosvika pakunyorova kwemvura nekukurumidza), kudonha kwechinhu chiri pasi pemvura, kuramba ngura (nzvimbo dzeEP dzakapfuma nechromium dzinoramba kusvibiswa), uye kuchena (nzvimbo dzakapfava dzinoburitsa zvinhu zvinochenesa uye dzinosuka mvura zvachose). Kunokanganisawo kuchinjika kwemvura: kupedzisa kwemvura yakachena, inodzorwa kunoita kuti pave nemhando yeweld inotenderera zvakanaka, zvichideredza njodzi yekusanganiswa kwemvura uye kusvibiswa kweruvara rwekupisa kunogona kuva manyuko ekusvibiswa mune ramangwana.

Maitiro Ekuderedza Dambudziko

Kuwana nekuchengetedza kuchena kwegasi kwakawanda kunoda musanganiswa wenzira dzakasiyana, imwe neimwe ichigadzirisa nzira yakasiyana yekusvibiswa.

Kurapa Kwepamusoro

Kuchenesa nemagetsi (EP) ndiyo nzira yakanakisisa yeUHP systems. Maitiro aya anobvisa simbi yakatetepa, inodzorwa pamusoro, achienzanisa ma micro-peaks, achivhura nekubvisa mitswe, uye achivandudza chromium iri mu passive film — izvo zvinoita kuti pamusoro payo pasave nengura uye pasave neunyoro. Paunenge uchisarudza UHP gas train, sarudzachubhu isina musono yakagadzirwa nemagetsikune zvikamu zvakanyoroveswa uye zvinosangana nemagetsi zvakafanana; kusanganisa mafinishes mukati meimwe sisitimu kunokanganisa kuchena kwechikamu chose. Pakushandisa kushoma, acid pickling uye passivation (AP) uye bright annealing (BA) zvinopa chiyero chakanaka chekuchena uye mutengo.

Kuchenesa uye Kubata

Kupedzisa pamusoro pechinhu chete hakuna kukwana — kuchenesa kwakasimba kunobvisa zvasara zvekugadzira, mafuta, uye hunyoro zvakasara kubva pamatanho ekutanga ekugadzirisa. Maitiro akajairika anosanganisira kubvisa mafuta mualkaline, kuchenesa ne ultrasound, uye kusukurudza mvura yakabviswa maion, zvichiteverwa nekuomesa munzvimbo yakachena uye kurongedza mukuchengetedzwa kwakavharwa, kwakaputirwa nemabhegi maviri. Kubata chirango kunokosha zvakafanana: magirovhosi, maturusi akachena, uye nzvimbo yekuchengetera yakafukidzwa zvinodzivirira tsvina pakati pechigayo nekuisa kwekupedzisira.

Kubika kunze

Kupisa zvinhu pasi pevacuum kana gasi rinoyerera rinokurumidzisa kusvibiswa kwemhepo, zvichibvisa hunyoro hwaizobuda mumhepo panguva yekushanda. Kubika kunze kwakakosha zvikuru kumavharuvhu, mafittings, uye majoini akasungirirwa, uko geometry nenzvimbo dzine hunyoro dzinogadzira nzvimbo dzakavanda dzehunyoro. Pamwe chete nekukasira, kubika kunze kunogona kuderedza nguva iyo sisitimu itsva inoda kusvika pakuchena kwepakutanga kubva pamazuva kusvika maawa.

Kubvisa

Kuyerera kwegasi risina simba, kazhinji nitrogen kana argon, kuburikidza nesystem kunobvisa tsvina yakabuda mugasi uye kunodzivirira hunyoro kuti husanyungudikezve. Kubvisa gasi inhanho yekutanga uye itsika inoenderera mberi: masisitimu akagadzirwa zvakanaka anochengetedza kucheneswa kusingapfuuriki kwenguva refu munzvimbo dzakamira uye anoshandisa gasi rekuchenesa rakawanda kuitira kuti kucheneswa pachako kusave chinhu chinosvibisa.

Kusarudzwa Kwezvinhu

Kushandisa zvinhu zvinobvisa gasi shoma kunoderedza kusvibiswa kwemukati zvisati zvavapo. Kune UHP service, 316L stainless steel inogadzirwa neVIM-VAR (vacuum induction melting inoteverwa ne vacuum arc remelting) ndiyo standard yeindasitiri: kunyunguduka kwevacuum kaviri kunoderedza zvinhu zvisina simbi uye kunoita kuti pave nechimiro chakafanana, chakakora chiri nyore kupedzisa zvakachena uye chisinganyanyi kudonha negasi. Zvinhu zvisina kunaka zvine zvinhu zvinogona kukunda kunyangwe kupedzwa kwepamusoro-soro, nekuti zvinhu zvinosanganisa zvinoshanda senzvimbo dzekutanga dzekuisa maburi uye kugadzira zvidimbu.

Kusarudza Nzvimbo Yakakodzera Yekushandisa Kwako

Maindasitiri akasiyana-siyana uye maitiro ane zvinodiwa zvakasiyana zvekuchena, uye kupedzisa kwakakodzera kunoenderana nekuchena nemutengo uye kuwanikwa. Kune mashandisirwo apo kuchena kwemazinga eppb kwakakwana - semuenzaniso, mitsetse yekushanda yakachena kwazvo uye zvigadzirwa zvemishonga - achubhu isina musono ine annealed yakajeka (BA)inopa chiyero chakanaka chemhando yepamusoro, kutonga kwehukuru hwayo, uye mutengo wayo. Kuti ive sevhisi inonyanya kudiwa, zvinhu zvakapukutwa nemagetsi zvinosarudzwa pasina dambudziko.

• Kugadzirwa kweSemiconductor uye flat-panels: EP finish, Ra ≤ 0.25 µm, 316L VIM-VAR, ine mabhegi maviri uye ine batch-certification. Outgassing uye particle budgets zvinotsanangurwa mu ppb–ppt uye zvinosimbiswa ne surface uye particle-count specifications.
• Magasi emagetsi neakakosha: EP kana machubhu eBA emhando yepamusoro ane kupedzisa kwemukati kwakadzorwa; makabati egasi nemapaneru ekuparadzira anoda mhando yakafanana kubva kuchikamu chimwe nechimwe.
• Mishonga ne biotech: Nzvimbo dzeEP kana BA dziri nyore kuchenesa uye kusimbisa, dzinosangana nemirairo yeASME BPE yekupedzisa nzvimbo uye dzinotsigira maCIP/SIP cycles.
• Zvishandiso zvekuongorora uye gasi chromatography:chubhu yezviridzwaine dhayamita yemukati inodzorwa uye kushivirira kwakanyatsojeka, nekuti kugadzikana kwechiratidzo kunoenderana negasi rinotakura rinogona kudzokororwa, risina kusvibiswa.
• Maitiro ese uye mapombi emuindasitiri: AP kana BA finishes inopa kuchena kwakakwana kwebasa re ppm-level nemutengo wakaderera.

Mitemo yeIndasitiri uye Magadzirirwo

Kutsanangura kupedzisa kwepazasi kunoda mutauro wakajairika. Ra (arithmetic mean roughness) ndiyo parameter inonyanya kushandiswa, asi mashandisirwo akakosha anorevawo Rz, Rmax, uye peak count, pamwe chete nemiyero yekuyera roughness yepamusoro yakaita seSEMI F19. Kune machubhu esimbi isina ngura, mareferensi akajairika anosanganisira ASTM A269 naA270 yechubhu isina musono uye yakachena, ASME BPE yemidziyo yekugadzira bioprocessing, uye SEMI standards yekushandiswa kwesemiconductor. Kana specification ichida mhando yeEP, inofanira kutaura kukosha kweRa, nzira yekuyera, uye zvinodiwa zvekugamuchira - semuenzaniso, "Ra ≤ 0.25 µm, yakayerwa nestylus profilometry pamusoro wemukati, yakaongororwa uye yakasimbiswa ne100%."

Mibvunzo Inowanzo bvunzwa

Mubvunzo: Ndeipi kukosha kweRa kunoonekwa segiredhi reUHP?

A: Masisitimu ekuchena kwakanyanya anowanzo tsanangura Ra ≤ 0.25 µm, uye akawanda ma semiconductor fabs anoda Ra ≤ 0.13 µm panzvimbo dzakaporishwa nemagetsi. Chinodiwa chaicho chinoenderana nemaitiro acho uye kirasi yekuchena kuri kupihwa.

Mubvunzo: Ko electropolishing inobvisa zvidimbu here?

A: Kuchenesa nemagetsi kunobvisa simbi yakarongwa, iyo inobvisa zvidimbu zvidiki, mapasuru, uye mitswe inovanda zvidimbu nehunyoro. Hazvitsivi kucheneswa: chikamu chakacheneswa nemagetsi chinofanira kucheneswa, kusukurudzwa, uye kurongedzwa munzvimbo yakachena.

Mubvunzo: Kupera kweganda kunokanganisa sei nguva yekuchenesa?

A: Nzvimbo dzakaomarara dzinochengeta hunyoro hwakawanda uye dzinodziburitsa zvishoma nezvishoma, saka kusvika pakuchena kwekutanga kunotora nguva yakareba. Nzvimbo dzakapfava dzakapfava dzinogona kuderedza nguva yekuchenesa nemaawa kana mazuva, izvo zvinoshandura zvakananga kuva makambani matsva anokurumidza uye nguva shoma yekushanda.

Mubvunzo: Chubhu inopenya inonamirwa (BA) yakakwana here pakushandisa magasi?

A: Chubhu yeBA ine Ra inosvika 0.25–0.4 µm yakakodzera kushandiswa kwakawanda kwekuchenesa kwakanyanya uye kwemishonga. Kune ppb–ppt semiconductor uye specialty-gas service, electropolishing inowanzo dikanwa.

Mubvunzo: Chii chakanakira masisitimu egasi akachena zvakanyanya?

A: Simbi isingasvibi ye316L inogadzirwa nekunyungudika kweVIM-VAR ndiyo sarudzo yakajairika yeUHP gas systems nekuda kwekusabatanidzwa kwayo kwakaderera uye chimiro chayo chakachena nguva dzose.

Mhedziso

Kupedzwa kwepamusoro hakusi hunhu hwekushongedza kwechubhu yesimbi isingatsvi - imhando inoshanda inodzora kunyungudika kwehunyoro, kuchengetedza zvidimbu, uye kubuda kwegasi muhupenyu hwese hwesisitimu yegesi. Kupedzwa kwepamusoro kwakapfava chinhu chinodiwa kuti uwane uye uchengetedze mwero wepamusoro wekuchena kwegasi. Nekusarudza kupedzwa kwakakodzera - kwakagadziriswa nemagetsi kuti ushande neUHP, kwakapfava kana kuti kwakabikwa uye kwakapfava kuti zvisanyanya kuoma - kuchisanganisa nezvinhu zvisinganyanyi kudonha gasi zvakaita se316L VIM-VAR stainless steel, uye kuchitsigira nekuchenesa kwakasimba, kubika, uye kuchenesa, mainjiniya vanogona kuvaka masisitimu ekuendesa gasi anosangana nezvinangwa zvekuchena zvakanyanya uye kuchengetedza zviripo kwehupenyu hwese hwechigadzirwa.